Scanning electron microscope objective lens calibration using X-Y voltages iteratively determined from images obtained using said voltages
US10790114B2 · kind B2 · utility
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20Claims
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Key dates
| Filing date | Aug 9, 2017 |
| Grant date | Sep 29, 2020 |
| Priority date | — |
| Expiry date | Dec 27, 2037 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/01079
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Objective lens alignment of a scanning electron microscope review tool with fewer image acquisitions can be obtained using the disclosed techniques and systems. Two different X-Y voltage pairs for the scanning electron microscope can be determined based on images. A second image based on the first X-Y voltage pair can be used to determine a second X-Y voltage pair. The X-Y voltage pairs can be applied at the Q4 lens or other optical components of the scanning electron microscope.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.