Inventor · Kawasaki, JP

Ichiro Honjo

10Patents
6h-index
15Co-inventors
63Inventor score

Filing activity: Mar 18, 1987 → Aug 9, 2017

Most-cited inventions

PatentTitleAreaCited byStatus
US5430292A Pattern inspection apparatus and electron beam apparatus Electricity 86 Expired
US5557105A Pattern inspection apparatus and electron beam apparatus Electricity 82 Expired
US5384463A Pattern inspection apparatus and electron beam apparatus Electricity 39 Expired
US4748646A X-ray lithography system Physics 13 Expired
US6130429A Miniaturized secondary electron detector Electricity 8 Expired
US6188167A Micro electron beam source and a fabrication process thereof Electricity 7 Expired
US5731228A Method for making micro electron beam source Electricity 6 Expired
US4789786A Method of projecting photoelectron image Electricity 6 Expired
US8921782B2 Tilt-imaging scanning electron microscope Electricity 1 Active
US10790114B2 Scanning electron microscope objective lens calibration using X-Y voltages iteratively determined from images obtained using said voltages Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.