Ichiro Honjo
10Patents
6h-index
15Co-inventors
63Inventor score
Filing activity: Mar 18, 1987 → Aug 9, 2017
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5430292A | Pattern inspection apparatus and electron beam apparatus | Electricity | 86 | Expired |
| US5557105A | Pattern inspection apparatus and electron beam apparatus | Electricity | 82 | Expired |
| US5384463A | Pattern inspection apparatus and electron beam apparatus | Electricity | 39 | Expired |
| US4748646A | X-ray lithography system | Physics | 13 | Expired |
| US6130429A | Miniaturized secondary electron detector | Electricity | 8 | Expired |
| US6188167A | Micro electron beam source and a fabrication process thereof | Electricity | 7 | Expired |
| US5731228A | Method for making micro electron beam source | Electricity | 6 | Expired |
| US4789786A | Method of projecting photoelectron image | Electricity | 6 | Expired |
| US8921782B2 | Tilt-imaging scanning electron microscope | Electricity | 1 | Active |
| US10790114B2 | Scanning electron microscope objective lens calibration using X-Y voltages iteratively determined from images obtained using said voltages | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.