X-ray inspection device, X-ray inspection method, and method of manufacturing structure
US10809208B2 · kind B2 · utility
15Cited by
5References
22Claims
0Family size
Assignee
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Key dates
| Filing date | Oct 24, 2017 |
| Grant date | Oct 20, 2020 |
| Priority date | — |
| Expiry date | Sep 2, 2038 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2223/419
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The X-ray inspection device includes a radiation source that irradiates X-rays toward a specimen that is rotated; a detector that detects transmitted X-rays irradiated by the radiation source, and passed through the specimen, and output a plurality of detection data for each angle of rotation; and a region extracting unit that extracts a region where the specimen is projected onto the detector, using the plurality of detection data.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.