Substrate transport apparatus, substrate processing apparatus, and dew condensation suppression method
US10816259B2 · kind B2 · utility
1Cited by
4References
8Claims
0Family size
Assignee
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Key dates
| Filing date | Mar 30, 2017 |
| Grant date | Oct 27, 2020 |
| Priority date | — |
| Expiry date | Apr 10, 2038 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/68728
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A substrate transport apparatus includes a substrate holding unit configured to hold a substrate; a casing; and a drive mechanism at least partially provided within the casing and configured to drive the substrate holding unit using air. The drive mechanism is capable of supplying air into the casing.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.