Ryuichi Kosuge
19Patents
4h-index
29Co-inventors
56Inventor score
Filing activity: Apr 9, 2003 → Feb 20, 2020
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7837534B2 | Apparatus for heating or cooling a polishing surface of a polishing apparatus | Performing Operations; Transporting | 15 | Active |
| US7850817B2 | Polishing device and substrate processing device | Electricity | 9 | Expired |
| US8382558B2 | Apparatus for dressing a polishing pad, chemical mechanical polishing apparatus and method | Performing Operations; Transporting | 9 | Active |
| US9434044B2 | Polishing apparatus | Performing Operations; Transporting | 5 | Active |
| US9409277B2 | Polishing apparatus and polishing method | Performing Operations; Transporting | 4 | Active |
| US9174324B2 | Polishing apparatus with polishing head cover | Performing Operations; Transporting | 2 | Active |
| US9522453B2 | Polishing apparatus | Performing Operations; Transporting | 1 | Active |
| US10816259B2 | Substrate transport apparatus, substrate processing apparatus, and dew condensation suppression method | Electricity | 1 | Active |
| US9144878B2 | Polishing apparatus and wear detection method | Electricity | 1 | Active |
| US8298369B2 | Liquid supply method, liquid supply apparatus, substrate polishing apparatus, and method of measuring supply flow rate of liquid | Performing Operations; Transporting | 1 | Active |
| US10157762B2 | Substrate processing apparatus and substrate presence or absence checking method and program | Electricity | 0 | Active |
| US10661411B2 | Apparatus for cleaning a polishing surface, polishing apparatus, and method of manufacturing an apparatus for cleaning a polishing surface | Performing Operations; Transporting | 0 | Active |
| US9764446B2 | Rotary joint and polishing apparatus | Performing Operations; Transporting | 0 | Active |
| US11433502B2 | Polishing table and polishing apparatus having ihe same | Performing Operations; Transporting | 0 | Active |
| US9530704B2 | Polishing apparatus and wear detection method | Electricity | 0 | Active |
| US9028297B2 | Polishing apparatus | Performing Operations; Transporting | 0 | Active |
| US11980998B2 | Polishing device, polishing method, and recording medium for recording program for determining supply position of polishing liquid | Performing Operations; Transporting | 0 | Active |
| US10926374B2 | Substrate processing apparatus | Performing Operations; Transporting | 0 | Active |
| US11839948B2 | Polishing apparatus | Performing Operations; Transporting | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.