Imaging reflectometer
US10816464B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 7, 2019 |
| Grant date | Oct 27, 2020 |
| Priority date | — |
| Expiry date | Mar 7, 2039 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2201/127
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An imaging reflectometer includes a source module configured to generate a plurality of input beams at different nominal wavelengths. An illumination pupil having a first numerical aperture (NA) is arranged so that each of the plurality of input beams passes through the illumination pupil. A large field lens is configured to receive at least a portion of each of the plurality of input beams and provide substantially telecentric illumination over a sample being imaged. The large field lens is also configured to receive reflected portions of the substantially telecentric illumination reflected from the sample. The reflected portions pass through an imaging pupil having a second NA that is lower than the first NA and are received by an imaging sensor module that generates image information.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.