Piezoelectrically actuated mirrors for optical communications

US10816733B2 · kind B2 · utility

Assignee

• Intel Corporation · US

Inventors

• Sasha N. Oster · Chandler, US
• Johanna M. Swan · Scottsdale, US
• Feras Eid · Chandler, US
• Thomas L. Sounart · Chandler, US
• Aleksandar Aleksov · Chandler, US
• Shawna M. Liff · Scottsdale, US
• Baris Bicen · Chandler, US
• Valluri Rao · Saratoga, US

Key dates

• Filing date: Apr 1, 2016
• Grant date: Oct 27, 2020
• Expiry date: Jul 22, 2036

Classification

• Technology area (CPC H): Electricity
• CPC primary: H04Q2011/0039
• WIPO field: Telecommunications
• WIPO sector: Electrical engineering

Abstract

Embodiments of the invention include an optical routing device that includes an organic substrate. According to an embodiment, an array of cavities are formed into the organic substrate and an array of piezoelectrically actuated mirrors may be anchored to the organic substrate with each piezoelectrically actuated mirror extending over a cavity. In order to properly rout incoming optical signals, the optical routing device may also include a routing die mounted on the organic substrate. The routing die may be electrically coupled to each of the piezoelectrically actuated mirrors and is able to generated a voltage across the first and second electrodes of each piezoelectrically actuated mirror. Additionally, a photodetector may be electrically coupled to the routing die. According to an embodiment, an array of fiber optic cables may be optically coupled with one of the piezoelectrically actuated mirrors and optically coupled with the photodetector.