Patent · US Active

Innovative imaging technique in transmission charged particle microscopy

US10825647B2 · kind B2 · utility

1Cited by
1References
11Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJan 23, 2019
Grant dateNov 3, 2020
Priority date—
Expiry dateJan 23, 2039

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01J2237/2802
  • WIPO fieldElectrical machinery, apparatus, energy
  • WIPO sectorElectrical engineering

Abstract

A method of using a Transmission Charged Particle Microscope, comprising:

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.