Polycrystalline silicon column and polycrystalline silicon wafer
US10825940B2 · kind B2 · utility
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7Claims
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Key dates
| Filing date | Aug 26, 2016 |
| Grant date | Nov 3, 2020 |
| Priority date | — |
| Expiry date | Jul 31, 2037 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02P70/50
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A polycrystalline silicon wafer is provided. The polycrystalline silicon wafer, includes a plurality of silicon grains, wherein the carbon content of the polycrystalline silicon wafer is greater than 4 ppma, and the resistivity of the polycrystalline silicon wafer is greater than or equal to 1.55 Ω-cm.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.