Patent · US Active

EELS detection technique in an electron microscope

US10832901B2 · kind B2 · utility

0Cited by
1References
15Claims
0Family size

Assignee

Inventors

Key dates

Filing dateMay 28, 2019
Grant dateNov 10, 2020
Priority date—
Expiry dateMay 28, 2039

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01J2237/24485
  • WIPO fieldElectrical machinery, apparatus, energy
  • WIPO sectorElectrical engineering

Abstract

A method of performing Electron Energy-Loss Spectroscopy (EELS) in an electron microscope, comprising: specifically comprising:

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.