Sheet sticking method
US10847404B2 · kind B2 · utility
0Cited by
30References
10Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | May 11, 2018 |
| Grant date | Nov 24, 2020 |
| Priority date | — |
| Expiry date | May 11, 2038 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2221/68377
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
There is provided a sheet sticking method including a sheet sticking step of sticking a sheet to a plate-shaped object and mounting the sheet to which the plate-shaped object is stuck to a ring-shaped frame having an opening to form a plate-shaped object unit including the ring-shaped frame, the plate-shaped object housed in the opening of the ring-shaped frame, and the sheet stuck to the plate-shaped object, and a tension alleviation step of alleviating tension generated in the sheet in the sheet sticking step after the sheet sticking step is carried out.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.