Device inspection circuit, device inspection device, and probe card
US10859601B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Jun 6, 2017 |
| Grant date | Dec 8, 2020 |
| Priority date | — |
| Expiry date | Sep 23, 2037 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R19/0092
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
There is provided a device inspection circuit capable of measuring currents flowing through a plurality of devices without increasing the cost. A power supply circuit of a box-side inspection circuit includes an operational amplifier and a sense resistor. A power source having a current measuring function, the operational amplifier, the sense resistor and a DUT are connected in series in this order. The power source is connected to a non-inverting input terminal of the operational amplifier. The power supply circuit further includes a negative feedback channel configured to apply a voltage between the sense resistor and the DUT to an inverting input terminal of the operational amplifier, and a positive feedback channel configured to connect an upstream sense point between the operational amplifier and the sense resistor and the non-inverting input terminal of the operational amplifier. The positive feedback channel includes a feedback resistor installed therein.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.