Athermalization of an alignment system
US10866531B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Sep 4, 2017 |
| Grant date | Dec 15, 2020 |
| Priority date | — |
| Expiry date | Sep 4, 2037 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F9/7096
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An alignment system configured to be substantially insensitive to thermal variations in its system during alignment measurements. The alignment system includes a sensor system, a support structure, a sensing element, a position measurement system, and an athermal interface between the sensing element and the support structure. The sensor system is configured to determine a position of an alignment mark on a substrate and the support structure is configured to support the sensor system. The sensing element is configured to detect an unintentional displacement of the support structure and the position measurement system is configured to measure the unintentional displacement relative to a reference element based on the detected unintentional displacement. The athermal interface is configured to prevent detection of temperature induced displacement of the support structure by the sensing element.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.