Cyclopentadienyl titanium alkoxides with ozone activated ligands for ALD of TiO2
US10870921B2 · kind B2 · utility
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Key dates
| Filing date | Dec 20, 2014 |
| Grant date | Dec 22, 2020 |
| Priority date | — |
| Expiry date | Aug 8, 2036 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/02271
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
An organotitanium compound selected from the group consisting of: Such organotitanium compounds are usefully employed in vapor deposition processes for depositing titanium on substrates, e.g., in the manufacture of microelectronic devices and microelectronic device precursor structures.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.