Charged particle beam device
US10872742B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 24, 2016 |
| Grant date | Dec 22, 2020 |
| Priority date | — |
| Expiry date | Feb 9, 2037 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2809
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A charged particle beam device capable of removing a foreign matter adhered to an electric field-correcting electrode arranged in an outer peripheral portion of a measurement sample is provided. The invention is directed to a charged particle beam device including a sample stage provided with the measurement sample and an electric field-correcting electrode correcting an electric field in the vicinity of the outer peripheral portion of the measurement sample and in which the measurement sample is measured by being irradiated with a charged particle beam, wherein a foreign-matter removal control unit controls a power source connected to the electric field-correcting electrode such that an absolute value of a voltage to be applied to the electric field-correcting electrode is equal to or more than an absolute value of a voltage to be applied to the electric field-correcting electrode when the measurement sample is measured.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.