Go Miya
21Patents
4h-index
28Co-inventors
59Inventor score
Filing activity: Aug 28, 2002 → Dec 23, 2019
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7396771B2 | Plasma etching apparatus and plasma etching method | Electricity | 8 | Active |
| US7887669B2 | Vacuum processing apparatus | Electricity | 6 | Active |
| US8232522B2 | Semiconductor inspecting apparatus | Electricity | 4 | Active |
| US9401297B2 | Electrostatic chuck mechanism and charged particle beam apparatus | Electricity | 4 | Active |
| US10872742B2 | Charged particle beam device | Electricity | 4 | Active |
| US8083889B2 | Apparatus and method for plasma etching | Electricity | 4 | Active |
| US7744721B2 | Plasma processing apparatus | Electricity | 4 | Active |
| US6866744B2 | Semiconductor processing apparatus and a diagnosis method therefor | Electricity | 3 | Expired |
| US6899766B2 | Diagnosis method for semiconductor processing apparatus | Electricity | 3 | Expired |
| US7713756B2 | Apparatus and method for plasma etching | Electricity | 2 | Active |
| US8653455B2 | Charged particle beam device and evaluation method using the charged particle beam device | Electricity | 2 | Active |
| US8519332B2 | Semiconductor inspecting apparatus | Electricity | 2 | Active |
| US7147747B2 | Plasma processing apparatus and plasma processing method | Electricity | 1 | Expired |
| US9799486B2 | Charged particle beam apparatus for measuring surface potential of a sample | Electricity | 0 | Active |
| US10128141B2 | Plasma processing apparatus and plasma processing method | Electricity | 0 | Active |
| US12106930B2 | Charged particle beam device | Electricity | 0 | Active |
| US11735394B2 | Charged particle beam apparatus | Electricity | 0 | Active |
| US9704731B2 | Plasma processing apparatus and plasma processing method | Electricity | 0 | Active |
| US8231759B2 | Plasma processing apparatus | Electricity | 0 | Active |
| US7147748B2 | Plasma processing method | Electricity | 0 | Expired |
| US8921781B2 | Measurement or inspecting apparatus | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.