Conductive beam optic containing internal heating element
US10879038B1 · kind B1 · utility
0Cited by
4References
20Claims
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Assignee
Inventor
Key dates
| Filing date | Jul 2, 2019 |
| Grant date | Dec 29, 2020 |
| Priority date | — |
| Expiry date | Jul 2, 2039 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/31705
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Provided herein are approaches for reducing particles in an ion implanter. In some embodiments, an electrostatic filter of the ion implanter may include a housing and a plurality of conductive beam optics within the housing, the plurality of conductive beam optics arranged around an ion beam-line. At least one conductive beam optic of the plurality of conductive beam optics may include a conductive core element, a resistive material disposed around the conductive core, and a conductive layer disposed around the resistive material.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.