Scott E. Peitzsch
7Patents
2h-index
9Co-inventors
40Inventor score
Filing activity: May 18, 2006 → Dec 6, 2021
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US9108322B2 | Force sensing system for substrate lifting apparatus | Emerging Cross-Sectional Technologies | 5 | Active |
| US8004817B2 | Method of platen fabrication to allow electrode pattern and gas cooling optimization | Emerging Cross-Sectional Technologies | 2 | Active |
| US7583491B2 | Electrostatic chuck to limit particle deposits thereon | Electricity | 2 | Expired |
| US11670532B1 | System and method for controlling electrostatic clamping of multiple platens on a spinning disk | Electricity | 1 | Active |
| US9417280B2 | System and method for analyzing voltage breakdown in electrostatic chucks | Physics | 1 | Active |
| US10732615B2 | System and method for minimizing backside workpiece damage | Physics | 0 | Active |
| US10879038B1 | Conductive beam optic containing internal heating element | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.