Patent · US Active

Apparatus and methods for alignment of a susceptor

US10883190B2 · kind B2 · utility

2Cited by

5References

16Claims

0Family size

Assignee

Applied Materials, Inc. · US

Inventors

Edric Tong · Sunnyvale, US
James Francis Mack · Palo Alto, US
Paul Brillhart · Pleasanton, US

Key dates

Filing date	Jul 10, 2015
Grant date	Jan 5, 2021
Priority date	—
Expiry date	Nov 18, 2036

Classification

Technology area (CPC H)Electricity
CPC primaryH05B3/68
WIPO fieldSurface technology, coating
WIPO sectorChemistry

Abstract

The embodiments described herein generally relate to a stem assembly for coupling a susceptor to a process chamber. The stem assembly includes a pivot mechanism, a first flexible seal coupled to the pivot mechanism, a second flexible seal coupled to a plate on a first side of the plate, the plate having a second side coupled to the first flexible seal, a housing coupled to the second flexible seal, and a motion assembly adapted to move the housing in an X axis and a Y axis, and position the susceptor angularly relative to an X-Y plane of the process chamber.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.