Inventor · Sunnyvale, CA, US

Edric Tong

26Patents
5h-index
46Co-inventors
69Inventor score

Filing activity: May 18, 1988 → Dec 14, 2023

Most-cited inventions

PatentTitleAreaCited byStatus
US4907931A Apparatus for handling semiconductor wafers Emerging Cross-Sectional Technologies 33 Expired
US6563586B1 Wafer metrology apparatus and method Electricity 25 Expired
US7611322B2 Processing thin wafers Emerging Cross-Sectional Technologies 9 Active
US7042580B1 Apparatus for imaging metrology Physics 5 Expired
US9845550B2 Upper dome with injection assembly Electricity 5 Active
US10062598B2 Thermal processing susceptor Chemistry; Metallurgy 4 Active
US6919958B2 Wafer metrology apparatus and method Electricity 4 Expired
US7177019B2 Apparatus for imaging metrology Electricity 3 Expired
US10930543B2 Thermal processing susceptor Chemistry; Metallurgy 2 Active
US10883190B2 Apparatus and methods for alignment of a susceptor Electricity 2 Active
US8970963B2 Multiple beam combiner for laser processing apparatus Physics 2 Active
US9285595B2 Multiple beam combiner for laser processing apparatus Physics 1 Active
US8569187B2 Thermal processing apparatus Electricity 1 Active
US10458040B2 Upper dome with injection assembly Electricity 1 Active
US10727093B2 Light pipe window structure for low pressure thermal processes Electricity 1 Active
US10269614B2 Susceptor design to reduce edge thermal peak Electricity 1 Active
US8206551B2 Processing thin wafers Emerging Cross-Sectional Technologies 1 Active
US10181409B2 Thermal processing apparatus Electricity 1 Active
US10619235B2 Effective and novel design for lower particle count and better wafer quality by diffusing the flow inside the chamber Electricity 1 Active
US6572456B2 Bathless wafer measurement apparatus and method Performing Operations; Transporting 0 Expired
US11848226B2 Thermal processing susceptor Chemistry; Metallurgy 0 Active
US11859307B2 Apparatus and methods for alignment of a susceptor Electricity 0 Active
US8354001B2 Processing thin wafers Emerging Cross-Sectional Technologies 0 Active
US12400904B2 Thermal processing susceptor Chemistry; Metallurgy 0 Active
US9927622B2 Multiple beam combiner for laser processing apparatus Physics 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.