Edric Tong
26Patents
5h-index
46Co-inventors
69Inventor score
Filing activity: May 18, 1988 → Dec 14, 2023
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US4907931A | Apparatus for handling semiconductor wafers | Emerging Cross-Sectional Technologies | 33 | Expired |
| US6563586B1 | Wafer metrology apparatus and method | Electricity | 25 | Expired |
| US7611322B2 | Processing thin wafers | Emerging Cross-Sectional Technologies | 9 | Active |
| US7042580B1 | Apparatus for imaging metrology | Physics | 5 | Expired |
| US9845550B2 | Upper dome with injection assembly | Electricity | 5 | Active |
| US10062598B2 | Thermal processing susceptor | Chemistry; Metallurgy | 4 | Active |
| US6919958B2 | Wafer metrology apparatus and method | Electricity | 4 | Expired |
| US7177019B2 | Apparatus for imaging metrology | Electricity | 3 | Expired |
| US10930543B2 | Thermal processing susceptor | Chemistry; Metallurgy | 2 | Active |
| US10883190B2 | Apparatus and methods for alignment of a susceptor | Electricity | 2 | Active |
| US8970963B2 | Multiple beam combiner for laser processing apparatus | Physics | 2 | Active |
| US9285595B2 | Multiple beam combiner for laser processing apparatus | Physics | 1 | Active |
| US8569187B2 | Thermal processing apparatus | Electricity | 1 | Active |
| US10458040B2 | Upper dome with injection assembly | Electricity | 1 | Active |
| US10727093B2 | Light pipe window structure for low pressure thermal processes | Electricity | 1 | Active |
| US10269614B2 | Susceptor design to reduce edge thermal peak | Electricity | 1 | Active |
| US8206551B2 | Processing thin wafers | Emerging Cross-Sectional Technologies | 1 | Active |
| US10181409B2 | Thermal processing apparatus | Electricity | 1 | Active |
| US10619235B2 | Effective and novel design for lower particle count and better wafer quality by diffusing the flow inside the chamber | Electricity | 1 | Active |
| US6572456B2 | Bathless wafer measurement apparatus and method | Performing Operations; Transporting | 0 | Expired |
| US11848226B2 | Thermal processing susceptor | Chemistry; Metallurgy | 0 | Active |
| US11859307B2 | Apparatus and methods for alignment of a susceptor | Electricity | 0 | Active |
| US8354001B2 | Processing thin wafers | Emerging Cross-Sectional Technologies | 0 | Active |
| US12400904B2 | Thermal processing susceptor | Chemistry; Metallurgy | 0 | Active |
| US9927622B2 | Multiple beam combiner for laser processing apparatus | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.