Patent · US Active

Electrostatic filter and ion implanter having asymmetric electrostatic configuration

US10886098B2 · kind B2 · utility

0Cited by

8References

19Claims

0Family size

Assignee

Applied Materials, Inc. · US

Inventors

Alexandre Likhanskii · Malden, US
Frank Sinclair · Quincy, US
Shengwu Chang · Hamilton, US
Eric D. Hermanson · Tewksbury, US
Nevin H. Clay · Boxford, US

Key dates

Filing date	Nov 20, 2018
Grant date	Jan 5, 2021
Priority date	—
Expiry date	Feb 16, 2039

Classification

Technology area (CPC H)Electricity
CPC primaryH01J2237/057
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

An apparatus may include a main chamber, an entrance tunnel, having an entrance axis extending into the main chamber, and an exit tunnel, connected to the main chamber and defining an exit axis, wherein the entrance tunnel and the exit tunnel define a beam bend of less than 25 degrees therebetween. The apparatus may include an electrode assembly, disposed in the main chamber, on a lower side of the exit tunnel; and a catch assembly, disposed within the main chamber, in a line of sight from an exterior aperture of the exit tunnel.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.