Faceplate with embedded heater
US10889894B2 · kind B2 · utility
5Cited by
29References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 12, 2019 |
| Grant date | Jan 12, 2021 |
| Priority date | — |
| Expiry date | Sep 17, 2039 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67103
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A faceplate for a processing chamber is disclosed. The faceplate has a body with a plurality of apertures formed therethrough. A flexure is formed in the body partially circumscribing the plurality of apertures. A cutout is formed through the body on a common radius with the flexure. One or more bores extend from a radially inner surface of the cutout to an outer surface of the body. A heater is disposed between flexure and the plurality of apertures. The flexure and the cutout are thermal chokes which limit heat transfer thereacross from the heater.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.