Inventor · Los Gatos, CA, US

Daniel HWUNG

3Patents
2h-index
15Co-inventors
31Inventor score

Filing activity: Oct 23, 2018 → Jul 12, 2019

Most-cited inventions

PatentTitleAreaCited byStatus
US10889894B2 Faceplate with embedded heater Electricity 5 Active
US10600624B2 System and method for substrate processing chambers Electricity 3 Active
US10907252B2 Horizontal heat choke faceplate design Chemistry; Metallurgy 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.