Horizontal heat choke faceplate design
US10907252B2 · kind B2 · utility
0Cited by
2References
19Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 23, 2018 |
| Grant date | Feb 2, 2021 |
| Priority date | — |
| Expiry date | Mar 8, 2039 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C16/45572
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
Embodiments herein relate to gas distribution apparatuses. In one aspect, the disclosure herein relates to a showerhead including a body having an upper surface and a lower surface. A thermal choke is disposed adjacent a perimeter of the body. The thermal choke includes a plurality of interleaved channels. One or more apertures are disposed between the upper surface and the lower surface of the body.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.