Nanotube structure based metal damascene process
US10910309B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 1, 2017 |
| Grant date | Feb 2, 2021 |
| Priority date | — |
| Expiry date | Jul 8, 2038 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/0002
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
In various embodiments a method for manufacturing a metallization layer on a substrate is provided, wherein the method may include providing a structured layer of a catalyst material on the substrate, the catalyst material may include a first layer of material arranged over the substrate and a second layer of material arranged over the first layer of material, wherein the structured layer of catalyst material having a first set of regions including the catalyst material over the substrate and a second set of regions free of the catalyst material over the substrate, and forming a plurality of groups of nanotubes over the substrate, each group of the plurality of groups of nanotubes includes a plurality of nanotubes formed over a respective region in the first set of regions.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.