Patent · US Active

Piezoelectric package-integrated current sensing devices

US10921349B2 · kind B2 · utility

1Cited by
4References
22Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJul 1, 2016
Grant dateFeb 16, 2021
Priority date
Expiry dateOct 13, 2036

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10N35/80
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

Embodiments of the invention include a current sensing device for sensing current in an organic substrate. The current sensing device includes a released base structure that is positioned in proximity to a cavity of the organic substrate and a piezoelectric film stack that is positioned in proximity to the released base structure. The piezoelectric film stack includes a piezoelectric material in contact with first and second electrodes. A magnetic field is applied to the current sensing device and this causes movement of the released base structure and the piezoelectric stack which induces a voltage (potential difference) between the first and second electrodes.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.