Temperature controlling apparatus, temperature controlling method, and placing table
US10923369B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 28, 2017 |
| Grant date | Feb 16, 2021 |
| Priority date | — |
| Expiry date | Nov 29, 2038 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2001
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Provided is a temperature controlling apparatus in which the accuracy of the temperature control of a processing target substrate is maintained high even when heaters are disconnected. The temperature controlling apparatus includes an electronic chuck, a plurality of heaters, and a controller. The heaters are embedded inside the electrostatic chuck in each divided region and connected to each other in parallel. The controller determines, for each divided region, whether a part of the heaters embedded in the divided region is disconnected, based on a total value of currents flowing through the heaters embedded in the divided region. When it is determined that a part of the heaters embedded in the divided region is disconnected, the controller controls a current flowing through each heater embedded in the divided region where a part of the heaters is disconnected to become larger than a current flowing through each heater when none of the heaters is disconnected.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.