Kengo Kaneko
7Patents
2h-index
5Co-inventors
40Inventor score
Filing activity: Jul 14, 2004 → May 17, 2021
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7510884B2 | Semiconductor production system and semiconductor production process | Physics | 4 | Expired |
| US10923369B2 | Temperature controlling apparatus, temperature controlling method, and placing table | Electricity | 2 | Active |
| US11011347B2 | Plasma processing apparatus | Electricity | 2 | Active |
| US7870751B2 | Temperature control system and substrate processing apparatus | Electricity | 1 | Active |
| US11735392B2 | Plasma processing apparatus | Electricity | 0 | Active |
| US10361089B2 | Plasma processing method | Electricity | 0 | Active |
| US11837480B2 | Temperature controlling apparatus, temperature controlling method, and placing table | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.