Substrate processing apparatus
US10926374B2 · kind B2 · utility
0Cited by
11References
8Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 31, 2017 |
| Grant date | Feb 23, 2021 |
| Priority date | — |
| Expiry date | Aug 30, 2038 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB24B37/30
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
The present disclosure provides a substrate processing apparatus including: a substrate holding unit that holds a substrate; a pressure regulator that regulates a pressure of a gas supplied into an elastic membrane; and a controller that controls the pressure regulator to make the pressure of the gas supplied into the elastic membrane variable in order to separate the substrate from the elastic membrane.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.