Metrology for OLED manufacturing using photoluminescence spectroscopy

US10935492B2 · kind B2 · utility

Assignee

• Applied Materials, Inc. · US

Inventors

• Avishek Ghosh · Espoo, FI
• Byung Sung Kwak · Portland, US
• Todd Egan · Fremont, US
• Robert Jan Visser · Menlo Park, US
• Gangadhar Banappanavar · Mumbai, IN
• Dinesh Kabra · Mumbai, IN

Key dates

• Filing date: Jan 25, 2019
• Grant date: Mar 2, 2021
• Expiry date: Feb 3, 2039

Classification

• Technology area (CPC G): Physics
• CPC primary: G01N2021/8438
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

An apparatus for determining a characteristic of a photoluminescent (PL) layer comprises: a light source that generates an excitation light that includes light from the visible or near-visible spectrum; an optical assembly configured to direct the excitation light onto a PL layer; a detector that is configured to receive a PL emission generated by the PL layer in response to the excitation light interacting with the PL layer and generate a signal based on the PL emission; and a computing device coupled to the detector and configured to receive the signal from the detector and determine a characteristic of the PL layer based on the signal.