Radiation analysis system
US10935673B2 · kind B2 · utility
4Cited by
8References
30Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Oct 2, 2017 |
| Grant date | Mar 2, 2021 |
| Priority date | — |
| Expiry date | Dec 27, 2037 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/7085
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A radiation analysis system comprising a target comprising two marks which are separated from each other, the target being configured to undergo thermal expansion when illuminated with radiation; a position measurement system configured to measure a change in the separation of the marks; and a processor configured to determine a power of the radiation using the measured change in separation of the marks.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.