Patent · US Active

Apparatus and method for controlling ion beam using electrostatic filter

US10937624B2 · kind B2 · utility

0Cited by

8References

19Claims

0Family size

Assignee

Applied Materials, Inc. · US

Inventors

Alexandre Likhanskii · Malden, US
Frank Sinclair · Quincy, US
Shengwu Chang · Hamilton, US

Key dates

Filing date	Nov 20, 2018
Grant date	Mar 2, 2021
Priority date	—
Expiry date	Dec 8, 2038

Classification

Technology area (CPC H)Electricity
CPC primaryH01J2237/057
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

An apparatus is provided. The apparatus may include a main chamber, an entrance tunnel, the entrance tunnel having an entrance axis extending into the main chamber; an exit tunnel, connected to the main chamber and defining an exit axis, wherein the entrance tunnel and the exit tunnel define a beam bend of less than 25 degrees therebetween, and an electrode assembly, disposed in the main chamber, and defining a beam path between the entrance tunnel and the exit tunnel. The electrode assembly may include an upper electrode, disposed on a first side of the beam path, and a plurality of lower electrodes, disposed on a second side of the beam path, the plurality of lower electrodes comprising at least three electrodes.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.