Structured pedestal for MTJ containing devices
US10937945B2 · kind B2 · utility
1Cited by
15References
11Claims
0Family size
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Key dates
| Filing date | Jan 22, 2019 |
| Grant date | Mar 2, 2021 |
| Priority date | — |
| Expiry date | Jan 22, 2039 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG11C2211/5615
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A magnetic tunnel junction (MTJ) containing device is provided that includes an undercut conductive pedestal structure having a concave sidewall positioned between a bottom electrode and a MTJ pillar. The geometric nature of such a conductive pedestal structure makes the pedestal structure unlikely to be resputtered and deposited on a sidewall of the MTJ pillar, especially the sidewall of the tunnel barrier of the MTJ pillar. Thus, electrical shorts caused by depositing resputtered conductive metal particles on the sidewall of the tunnel barrier of the MTJ pillar are substantially reduced.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.