Power feed member and substrate processing apparatus
US10943766B2 · kind B2 · utility
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1References
11Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 25, 2018 |
| Grant date | Mar 9, 2021 |
| Priority date | — |
| Expiry date | Dec 18, 2038 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/334
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A power feed member having high heat insulation and capable of transmitting a power at a low loss is provided. The power feed member configured to supply a power includes a first conductive member; a second conductive member; and a connecting member configured to electrically connect the first conductive member and the second conductive member. At least a part of the connecting member is formed of a porous metal or multiple bulk metals.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.