Laser-driven photon source and inspection apparatus including such a laser-driven photon source
US10948421B2 · kind B2 · utility
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11References
14Claims
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Key dates
| Filing date | Aug 27, 2015 |
| Grant date | Mar 16, 2021 |
| Priority date | — |
| Expiry date | Sep 1, 2035 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2021/95676
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Disclosed is a laser-driven photon source comprising drive optics which focus drive radiation so as to maintain a plasma. The point spread function of the drive optics has a point spread function (75) which is configured such that a spectral position of a peak output wavelength of a black body portion of output radiation emitted by said plasma within a desired wavelength band.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.