Information determining apparatus and method
US10948837B2 · kind B2 · utility
0Cited by
7References
21Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 18, 2018 |
| Grant date | Mar 16, 2021 |
| Priority date | — |
| Expiry date | Jun 18, 2038 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2223/54453
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An apparatus for determining information relating to at least one target alignment mark in a semiconductor device substrate. The target alignment mark is initially at least partially obscured by an opaque carbon or metal layer on the substrate. The apparatus includes an energy delivery system configured to emit a laser beam for modifying at least one portion of the opaque layer to cause a phase change and/or chemical change in the at least one portion that increases the transparency of the portion. An optical signal can propagate through the modified portion to determine information relating to the target alignment mark.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.