Andrey Nikipelov
32Patents
3h-index
125Co-inventors
58Inventor score
Filing activity: Sep 23, 2013 → Dec 28, 2021
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US10228615B2 | Membranes for use within a lithographic apparatus and a lithographic apparatus comprising such a membrane | Physics | 9 | Active |
| US9728931B2 | Electron injector and free electron laser | Electricity | 4 | Active |
| US10580545B2 | Beam delivery apparatus and method | Physics | 3 | Active |
| US9853412B2 | Radiation source | Electricity | 3 | Active |
| US9823572B2 | Lithographic method | Electricity | 2 | Active |
| US10884339B2 | Lithographic method | Electricity | 2 | Active |
| US11170907B2 | Radioisotope production | Electricity | 2 | Active |
| US11874607B2 | Method for providing a wear-resistant material on a body, and composite body | Electricity | 1 | Active |
| US10437154B2 | Lithographic method | Electricity | 1 | Active |
| US9986628B2 | Method and apparatus for generating radiation | Electricity | 1 | Active |
| US10908496B2 | Membrane for EUV lithography | Physics | 1 | Active |
| US9773578B2 | Radiation source-collector and method for manufacture | Physics | 1 | Active |
| US11287747B2 | End facet protection for a radiation source and a method for use in metrology applications | Physics | 0 | Active |
| US11673169B2 | Membrane cleaning apparatus | Physics | 0 | Active |
| US12313980B2 | Inspection system, lithographic apparatus, and inspection method | Electricity | 0 | Active |
| US10976196B2 | Sensor mark and a method of manufacturing a sensor mark | Physics | 0 | Active |
| US11762281B2 | Membrane for EUV lithography | Physics | 0 | Active |
| US12055478B2 | Apparatus and method for cleaning an inspection system | Physics | 0 | Active |
| US10103508B2 | Electron injector and free electron laser | Electricity | 0 | Active |
| US10468225B2 | Electron source for a free electron laser | Electricity | 0 | Active |
| US10948837B2 | Information determining apparatus and method | Electricity | 0 | Active |
| US9952513B2 | Undulator | Electricity | 0 | Active |
| US11231657B2 | Cooling apparatus and plasma-cleaning station for cooling apparatus | General | 0 | Revoked |
| US11550234B2 | Object in a lithographic apparatus | Physics | 0 | Active |
| US11287752B2 | Cooling apparatus and plasma-cleaning station for cooling apparatus | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.