Method, computer program product and system for detecting manufacturing process defects
US10957567B2 · kind B2 · utility
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13Claims
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Key dates
| Filing date | Nov 13, 2019 |
| Grant date | Mar 23, 2021 |
| Priority date | — |
| Expiry date | Nov 13, 2039 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02P90/02
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A system, computer program product and a method for detecting manufacturing process defects, the method may include: obtaining multiple edge measurements of one or more structural elements after a completion of each one of multiple manufacturing phases; generating spatial spectrums, based on the multiple edge measurements, for each one of the multiple manufacturing phases; determining relationships between bands of the spatial spectrums; and identifying at least one of the manufacturing process defects based on the relationships between the bands of the spatial spectrums.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.