Inventor · Rehovot, IL

Ofer Adan

10Patents
2h-index
24Co-inventors
50Inventor score

Filing activity: May 19, 2011 → Dec 24, 2020

Most-cited inventions

PatentTitleAreaCited byStatus
US9046475B2 High electron energy based overlay error measurement methods and systems Physics 15 Active
US9530199B1 Technique for measuring overlay between layers of a multilayer structure Physics 8 Active
US10049904B1 Method and system for moving a substrate Electricity 2 Active
US9916652B2 Technique for measuring overlay between layers of a multilayer structure Physics 2 Active
US12250503B2 Prediction of electrical properties of a semiconductor specimen Electricity 0 Active
US9383196B2 System, method and computed readable medium for evaluating a parameter of a feature having nano-metric dimensions Electricity 0 Active
US9835563B2 Evaluation system and a method for evaluating a substrate Physics 0 Active
US10354376B2 Technique for measuring overlay between layers of a multilayer structure Physics 0 Active
US9297692B2 System and method for inspecting a sample using landing lens Physics 0 Active
US10957567B2 Method, computer program product and system for detecting manufacturing process defects Emerging Cross-Sectional Technologies 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.