High temperature heater for processing chamber
US10959294B2 · kind B2 · utility
0Cited by
10References
9Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 28, 2016 |
| Grant date | Mar 23, 2021 |
| Priority date | — |
| Expiry date | Jan 9, 2038 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/68771
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
Heater assemblies comprising a cylindrical body with a surface and a central axis including a plurality of heating elements are described. The plurality of heating elements is axially spaced on the surface of the cylindrical body. Each of the heating elements forms an axially spaced heating zone. Each heating element has a spiral shape with an inner end and an outer end defining a length of the heating element. Each coil of the spiral shape is spaced from an adjacent coil by a distance sufficient to prevent arcing between adjacent coils.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.