Patent · US Active

Low particle protected flapper valve

US10969029B2 · kind B2 · utility

0Cited by

12References

20Claims

0Family size

Assignee

Applied Materials, Inc. · US

Inventors

Charles T. Carlson · Cedar Park, US
Tammy Jo Pride · Pflugerville, US
Benjamin B. Riordon · Newburyport, US
Aaron P. Webb · Austin, US

Key dates

Filing date	Dec 1, 2017
Grant date	Apr 6, 2021
Priority date	—
Expiry date	Dec 1, 2037

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY10T137/88062
WIPO fieldMechanical elements
WIPO sectorMechanical engineering

Abstract

Embodiments of the disclosure generally relate to a flapper valve. The flapper valve may be used with processing chambers, such as semiconductor substrate processing chambers. In one embodiment, a flapper valve includes a housing having a first opening at a first end thereof and a second opening at a second end thereof, a first flapper pivotably disposed in the housing, and a second flapper pivotably disposed in the housing. The first and second flappers are movable to selectively open and close at least one of the first opening and the second opening.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.