Selection of substrate measurement recipes
US10983440B2 · kind B2 · utility
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20Claims
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Key dates
| Filing date | May 9, 2017 |
| Grant date | Apr 20, 2021 |
| Priority date | — |
| Expiry date | May 9, 2037 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70641
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A method including: obtaining a relationship between a performance indicator of a substrate measurement recipe and a parameter of the substrate measurement recipe; deriving a range of the parameter from the relationship, wherein absolute values of the performance indicator satisfy a first condition or a magnitude of variation of the performance indicator satisfies a second condition, when the first parameter is in the range; selecting a substrate measurement recipe that has the parameter in the range; and inspecting a substrate with the selected substrate measurement recipe.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.