Exhaust system with u-shaped pipes
US10983447B2 · kind B2 · utility
0Cited by
2References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 14, 2017 |
| Grant date | Apr 20, 2021 |
| Priority date | — |
| Expiry date | Feb 5, 2039 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02C20/10
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
The present disclosure provides an exhaust system for discharging from semiconductor manufacturing equipment a hazardous gas. The exhaust system includes: a main exhaust pipe having a top surface and a bottom surface; a first branch pipe including an upstream end coupled to a source of a gas mixture containing the hazardous gas and a downstream end connected to the main exhaust pipe through the top surface; a second branch pipe including a downstream end connected to the main exhaust pipe through the bottom surface; and a detector configured to detect presence of the hazardous gas in the second branch pipe.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.