Charged particle detector and charged particle beam apparatus

US10984979B2 · kind B2 · utility

Assignee

• HITACHI HIGH-TECH CORPORATION · JP

Inventors

• Shin Imamura · Tokyo, JP
• Takashi Ohshima · Tokyo, JP
• Tomonobu Tsuchiya · Hachioji, JP
• Hajime Kawano · Tokyo, JP
• Shahedul Hoque · Hitachinaka, JP
• Shunsuke Mizutani · Ebeye, US
• Makoto Suzuki · Ebeye, US

Key dates

• Filing date: Jan 25, 2018
• Grant date: Apr 20, 2021
• Expiry date: Feb 27, 2038

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01J2237/2443
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

The disclosure provides a charged particle detector including a scintillator that emits light with stable intensity and obtains high light emission intensity regardless of an energy of an incident electron. The disclosure provides the charged particle detector including: a first light-emitting part (21) in which a layer containing Ga1-x-yAlxInyN (where 0≤x<1, 0≤y<1) and a layer containing GaN are alternately laminated; a second light-emitting part (23) in which the layer containing Ga1-x-yAlxInyN (where 0≤x<1, 0≤y<1) and the layer containing GaN are alternately laminated; and a non-light-emitting part (22) that is interposed between the first light-emitting part (21) and the second light-emitting part (23) (see FIG. 2).