Tomography-assisted TEM prep with requested intervention automation workflow
US11004651B2 · kind B2 · utility
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13Claims
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Key dates
| Filing date | Sep 19, 2019 |
| Grant date | May 11, 2021 |
| Priority date | — |
| Expiry date | Sep 19, 2039 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/31749
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Provided is a process for lamella thinning and endpointing that substitutes a series of automated small angle tilts for the motions in the conventional endpointing sequence. STEM images or through-surface BSE scans are acquired at each tilt. The results are analyzed automatically to determine feature depths, and an intervention request is made requesting a user decision based on marked-up images and summary information displayed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.