Group 6 transition metal-containing compositions for vapor deposition of group 6 transition metal-containing films
US11021793B2 · kind B2 · utility
0Cited by
4References
2Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 31, 2018 |
| Grant date | Jun 1, 2021 |
| Priority date | — |
| Expiry date | Dec 23, 2038 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C16/4481
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
Disclosed are Group 6 transition metal-containing thin film forming precursors to deposit Group 6 transition metal-containing films on one or more substrates via vapor deposition processes.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.