Ingot puller apparatus that include a doping conduit with a porous partition member for subliming solid dopant
US11028500B2 · kind B2 · utility
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4References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 14, 2018 |
| Grant date | Jun 8, 2021 |
| Priority date | — |
| Expiry date | Feb 28, 2039 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC30B15/14
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
Ingot puller apparatus for preparing silicon ingots that include a dopant feed system are disclosed. The dopant feed system include a dopant conduit having a porous partition member disposed across the dopant conduit. Solid dopant falls onto the partition member where it sublimes. The sublimed dopant is carried by inert gas through the partition member to contact and dope the silicon melt.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.