Computerized method for configuring an inspection system, computer program product and an inspection system
US11029253B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 30, 2017 |
| Grant date | Jun 8, 2021 |
| Priority date | — |
| Expiry date | Oct 1, 2037 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06T2207/30148
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A computer program product, a computerized method for configuring an inspection system and an inspection system. The inspection system may include an image acquisition module that comprises illumination optics and collection optics, a controller; and a processor. The image acquisition module may be arranged to acquire a group of first images of an object segment. Different first images of the group of first images are acquired while the inspection system is configured with different polarization configurations that belong to a first group of polarization configurations. The processor may be arranged to determine polarization parameters of different points within the object segment; wherein the determining is based on the group of first images and the different polarization configurations and calculate, based on the polarization parameters of the different points, a group of second images of the object segment that would be acquired when the inspection system is configured according to different polarization configurations that belong to a second group of polarization configurations.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.