Method and apparatus to reduce effects of nonlinear behavior
US11036146B2 · kind B2 · utility
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17References
21Claims
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Key dates
| Filing date | Sep 26, 2016 |
| Grant date | Jun 15, 2021 |
| Priority date | — |
| Expiry date | Sep 26, 2036 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70641
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A method including: obtaining information regarding a patterning error in a patterning process involving a patterning device; determining a nonlinearity over a period of time introduced by modifying the patterning error by a modification apparatus according to the patterning error information; and determining a patterning error offset for use with the modification apparatus based on the determined nonlinearity.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.