Local alignment point calibration method in die inspection
US11043356B2 · kind B2 · utility
0Cited by
2References
24Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 2, 2019 |
| Grant date | Jun 22, 2021 |
| Priority date | — |
| Expiry date | Dec 2, 2039 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L22/12
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A calibration method for calibrating the position error in the point of interest induced from the stage of the defect inspection tool is achieved by controlling the deflectors directly. The position error in the point of interest is obtained from the design layout database.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.